Crystallinity and hardness of B+-implanted Fe

Hirano, Motohisa; Miyake, Shojiro
May 1988
Applied Physics Letters;5/2/1988, Vol. 52 Issue 18, p1469
Academic Journal
Pure Fe is implanted with B+ at a target temperature range of -20 to 300 °C. The effects of the target temperature on the crystallinity and hardness in the B+ -implanted Fe are investigated. It was found that Fe2B is formed by using direct B+ implantation into pure Fe without subsequent annealing. ‘‘Cold implantation,’’ where the implantation is performed at a lower target temperature, reduces crystallinity and increases the hardness of the B+ -implanted Fe. An increase in target temperature, therefore, renders the B+ -implanted Fe with high crystallinity and relatively low hardness.


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