Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation

Craˇciun, V.; Mihaˇilescu, I. N.; Ursu, I.; Craˇciunoiu, F.; Corici, A.; Leggieri, G.; Luches, A.; Nassisi, V.; Martino, M.
April 1988
Applied Physics Letters;4/11/1988, Vol. 52 Issue 15, p1225
Academic Journal
We synthesized titanium nitride and titanium silicide layers on silicon by only one-step multipulse laser irradiation of titanium-coated silicon wafers in a jet of nitrogen, with characteristics appropriate for utilization in metallization schemes with very large scale integration devices.


Related Articles

  • Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen-containing atmosphere. D’Anna, E.; Leggieri, G.; Luches, A.; Martino, M.; Drigo, A. V.; Mihailescu, I. N.; Ganatsios, S. // Journal of Applied Physics;2/1/1991, Vol. 69 Issue 3, p1687 

    Presents a study that examined the synthesis titanium nitride layers by multipulse excimer laser irradiation in a nitrogen or ammonia atmosphere. Characteristics of the titanium nitride layers; Determination of the microhardness of the titanium nitride layers; Examination of the electron...

  • Tribological characterization of TiCN coatings deposited by two crossed laser ablation plasma beams. Camps, Enrique; Escobar-Alarcón, L.; Camps, Iván; Muhl, Stephen; Flores, Martín // Applied Physics A: Materials Science & Processing;Mar2013, Vol. 110 Issue 4, p957 

    The simultaneous laser ablation of two targets (graphite and titanium) in an Ar-N gas mixture was carried out to deposit thin films of the ternary compound TiCN at room temperature. The base conditions used to produce the TiN without carbon were taken from our previous studies. The experimental...

  • Effect of laser post-treatment on AlO-TiB-TiN composite coating with free hBN. Chatterjee, Satyajit; Majumdar, J.; Shariff, S.; Padmanabham, G.; Choudhury, A. // International Journal of Advanced Manufacturing Technology;Jul2012, Vol. 61 Issue 5-8, p559 

    The development of nanostructured, hard, and wear-resistant composite coating of AlO, TiB, and TiN on low carbon steel (AISI 1025) substrate by combined self-propagating high-temperature synthesis (SHS) and laser surface alloying (LSA) has already been communicated in the author's previous...

  • Low-temperature processing of titanium nitride films by laser physical vapor deposition. Biunno, N.; Narayan, J.; Hofmeister, S. K.; Srivatsa, A. R.; Singh, R. K. // Applied Physics Letters;4/17/1989, Vol. 54 Issue 16, p1519 

    We have investigated the formation of polycrystalline TiN films on (100) Si substrates using a low-temperature laser processing method. The films were deposited by laser ablation of a TiN hot-pressed pellet in the presence of neutral or ionized nitrogen using a XeCl excimer laser (wavelength 308...

  • Synthesis of epitaxial Pt on (100)Si using TiN buffer layer by pulsed laser deposition. Tiwari, P.; Wu, X.D. // Applied Physics Letters;11/21/1994, Vol. 65 Issue 21, p2693 

    Investigates the synthesis of epitaxial platinum films on (100)silicon using titanium nitride buffer layer. Application of pulsed laser deposition; Percentage of ion beam channeling; Properties of the multilayer structure.

  • Evolution of texture at growth of titanium nitride films prepared by photon and ion beam.... Zeitler, M.; Gerlach, J.W. // Applied Physics Letters;3/10/1997, Vol. 70 Issue 10, p1254 

    Investigates the effect of film thickness on the evolution of polycrystalline titanium nitride films texture grown by photon and ion beam assisted deposition. Deposition of layers in high-vacuum on (111)Si with the N-ion energy constant at 2kev; Measurement of x-ray pole figure; Explanation for...

  • Degradation of TiN Coatings on Inconel 617 and Silicon Wafer Substrates Under Pulsed Laser Ablation. Jeon, Seol; Lee, Heesoo; Jo, Ilguk; Shin, Dongwon; Lee, Ki-Seuk // Journal of Materials Engineering & Performance;May2014, Vol. 23 Issue 5, p1651 

    The degradation behavior of TiN coatings on Inconel 617 and silicon (Si) wafer substrates was compared following Nd:YAG pulsed laser ablation to apply thermomechanical stress. Surface cracks and pores were observed on the TiN coating on the Inconel 617 after five pulses, and melting of the...

  • Comparative Study of Two Laser Coatings Used in Turbine Blades. Wei-fu Wang; Jian-zhou Xie; Liu-yi Huang; Fang-fang Zhang // Applied Mechanics & Materials;2014, Vol. 711, p193 

    In order to compare the performances of two typical laser coatings used in turbine blades, the Ti-N coatings of Ti6Al4V alloy and solution-aging coatings of 17-4PH alloy were fabricated by laser treatment with optimized parameters, respectively. The formation mechanisms and performances are...

  • Growth and Characterisation of Pulsed-Laser Deposited Tin Thin Films on Cube-Textured Copper at Different Temperatures. Szwachta, G.; Gajewska, M.; Kąc, S. // Archives of Metallurgy & Materials;Jun2016, Vol. 61 Issue 2, p1031 

    High-quality titanium nitride thin films have been grown on a cube-textured copper surface via pulsed laser deposition. The growth of TiN thin films has been very sensitive to pre-treatment procedure and substrate temperature. It is difficult to grow heteroexpitaxial TiN films directly on copper...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics