TITLE

Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation

AUTHOR(S)
Craˇciun, V.; Mihaˇilescu, I. N.; Ursu, I.; Craˇciunoiu, F.; Corici, A.; Leggieri, G.; Luches, A.; Nassisi, V.; Martino, M.
PUB. DATE
April 1988
SOURCE
Applied Physics Letters;4/11/1988, Vol. 52 Issue 15, p1225
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We synthesized titanium nitride and titanium silicide layers on silicon by only one-step multipulse laser irradiation of titanium-coated silicon wafers in a jet of nitrogen, with characteristics appropriate for utilization in metallization schemes with very large scale integration devices.
ACCESSION #
9826467

 

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