Kinematical simulation of high-resolution x-ray diffraction curves of GexSi1-x/Si strained-layer superlattices: A structural assessment

Vandenberg, J. M.; Bean, J. C.; Hamm, R. A.; Hull, R.
April 1988
Applied Physics Letters;4/4/1988, Vol. 52 Issue 14, p1152
Academic Journal
High-resolution x-ray diffraction (HRXRD) measurements of GexSi1-x/Si strained-layer superlattices are carried out using a four-crystal monochromator. A wide asymmetric range of extremely sharp higher order x-ray satellite peaks is observed indicating a well-defined strained-layer superlattice with abrupt interfaces. This is further confirmed by cross-section transmission electron microscopy. Using a kinematical diffraction step model which assumes ideally sharp interfaces, the thickness, strain, and composition of the GexSi1-x well could be extracted. Excellent agreement between measured and simulated x-ray satellite patterns is achieved. These results show that HRXRD together with kinematical simulation provides a powerful tool to evaluate the structural perfection of GexSi1-x/Si strained-layer superlattices.


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