TITLE

Evidence of a photon effect during the visible laser-assisted deposition of polycrystalline silicon from silane

AUTHOR(S)
Auvert, G.; Tonneau, D.; Pauleau, Y.
PUB. DATE
March 1988
SOURCE
Applied Physics Letters;3/28/1988, Vol. 52 Issue 13, p1062
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Silicon dots have been produced by the decomposition of silane on Si layers deposited on quartz plates and irradiated by a cw Ar+ laser beam. The vertical deposition rate of Si dots was investigated as a function of irradiation time, output laser power, and silane pressure. The Si layer on quartz was first irradiated with the laser beam penetrating through the transparent quartz plate (back irradiation). The deposition of Si dots occurred by pyrolytic decomposition of ‘‘cold’’ silane molecules impinging on the laser heated area. When the surface of the Si layer on quartz was directly irradiated with the visible laser beam (front irradiation), the deposition of Si dots was accomplished at lower temperatures and involved an interaction of photons with reactive species. The kinetics of this photon-aided process is surface controlled and characterized by an apparent activation energy of about 38 kcal mol-1.
ACCESSION #
9826362

 

Related Articles

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics