Time-resolved plasma parameter measurements in a low-frequency rf glow discharge

Anderson, Colin A.; Graham, William G.; Hopkins, Michael B.
March 1988
Applied Physics Letters;3/7/1988, Vol. 52 Issue 10, p783
Academic Journal
A new approach to the use of Langmuir probes in a rf driven plasma is presented. The periodic nature of the rf is utilized to overcome the distortion of the probe characteristics caused by averaging over many rf cycles. Time-resolved measurements of the electron density, electron temperature, plasma potential, and floating potential in the negative portion of the rf cycle are obtained. The technique is used to characterize a low-pressure 100-kHz capacitively coupled rf argon discharge. The measured electron temperature is found to be approximately 0.5 eV.


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