Chemically etched micromirrors in silicon

Kendall, D. L.; de Guel, G. R.; Guel-Sandoval, S.; Garcia, E. J.; Allen, T. A.
March 1988
Applied Physics Letters;3/7/1988, Vol. 52 Issue 10, p836
Academic Journal
Purposely introduced pinholes can be processed so as to produce nearly spherical or paraboloidal depressions in (100) silicon by a two-step chemical etching procedure in KOH:water solutions. Regular arrays of f/1–f/10 specularly reflecting micromirrors can be fabricated.


Related Articles

  • Spectra of Photoluminescence from Silicon Nanocrystals. Kaganovich, É. B.; Manoılov, É. G.; Basylyuk, I. R.; Svechnikov, S. V. // Semiconductors;Mar2003, Vol. 37 Issue 3, p336 

    The evolution of time-resolved photoluminescence (PL) spectra in Au-doped nanocrystalline silicon films produced by laser ablation has been studied. The PL spectra with a relaxation time of nanoseconds are broad; they lie in the energy range 1.4-3.2 eV with a peak at 2.4-2.8 eV. At the longest...

  • Observation of Coherent Phonon States in Porous Silicon Films. Dobryakov, A. L.; Karavanskiı, V. A.; Kovalenko, S. A.; Merkulova, S. P.; Lozovik, Yu. E. // JETP Letters;4/10/2000, Vol. 71 Issue 7, p298 

    The dynamics of differential transmission and reflectance spectra of porous silicon films was studied using the femtosecond excitation technique (τapprox. 50 fs, hω[sub pump] = 2.34 eV) with supercontinuum probing (hω[sub probe] = 1.6–3.2 eV) and controlled time delay with a...

  • Visualization of the reconstruction of a silver film on silicon. Pronin, I. I.; Faradzhev, N. S.; Gomoyunova, M. V. // Technical Physics Letters;Feb97, Vol. 23 Issue 2, p142 

    In this investigation the focusing of medium-energy electrons is used to visualize the thermally activated reconstruction of a thin film of silver (6 monolayers) deposited on a Si(111)- 7 × 7 surface at room temperature. It is shown that the initial unannealed film consists of Ag(111)...

  • Nanostructured silicon films obtained by neutral cluster depositions. Melinon, P.; Keghelian, P.; Prevel, B.; Perez, A.; Guiraud, G.; LeBrusq, J.; Lerme, J.; Pellarin, M.; Broyer, M. // Journal of Chemical Physics;12/15/1997, Vol. 107 Issue 23, p10278 

    Studies nanosize neutral silicon clusters produced using a laser vaporization source in the gas phase and deposited on various substrates. Characterization of the nanostructured thin films; Comparison of film properties with those of a disordered phase; Interpretation of features in the...

  • Buffer Layers for the Growth of YBa[sub 2]Cu[sub 3]O[sub 7 – ][sub x] Films on Silicon. Razumov, S. V.; Tumarkin, A. V. // Technical Physics Letters;Jul2001, Vol. 27 Issue 7, p599 

    Experimental structural characteristics of the SrTiO[sub 3], NdGaO[sub 3], and CeO[sub 2] buffer films obtained by ion-plasma sputter deposition on silicon substrates are presented. It is demonstrated that the phase composition and the level of internal stresses in the films strongly depend on...

  • Nanocrystalline silicon thin-film transistors with 50-nm-thick deposited channel layer, 10 cm[sup 2] V[sup -1] s[sup -1] electron mobility and 10[sup 8] on/off current ratio. Min, R.B.; Wagner, S. // Applied Physics A: Materials Science & Processing;2002, Vol. 74 Issue 4, p541 

    Thin-film transistors were made using 50-nm-thick directly deposited nanocrystalline silicon channel layers. The transistors have a coplanar top gate structure. The nanocrystalline silicon was deposited from discharges in silane, hydrogen and silicon tetrafluoride. The transistors combine a high...

  • Distinctive features of time-resolved photoluminescence of porous silicon coated with a layer of diamondlike carbon. Piryatinskiı, Yu. P.; Semenovich, V. A.; Klyuı, N. I.; Rozhin, A. G. // Technical Physics;Apr98, Vol. 43 Issue 4, p423 

    Time-resolved photoluminescence from porous silicon coated with a diamondlike carbon film is investigated. The intensity of the photoluminescence from the carbon film is obserd to increase after deposition, and there is an accompanying change in the intensity and a shortwavelength shift of the...

  • Synthesis of a pH- and Thermo- Responsive Binary Copolymer Poly(N-vinylimidazole-co-N-vinylcaprolactam) Grafted onto Silicone Films. Obando-Mora, Ángela; Acevedo-Gutiérrez, Claudia A.; Pérez-Cinencio, Jesica G.; Sánchez-Garzón, Francis S.; Bucio, Emilio // Coatings (2079-6412);2015, Vol. 5 Issue 4, p758 

    This work focuses on the effects of gamma-ray irradiation conditions on the stimuli-responsiveness of silicone rubber (SR) substrates grafted with N-vinylcaprolactam (NVCL) and N-vinylimidazole (NVIM), modified by the simultaneously polymerization and grafting method, which is expected to result...

  • An Empirical Relation for Critical Load of DLC Coatings Prepared on Silicon Substrates. Sheeja, D.; Tay, B. K.; Lau, S. P.; Leong, K. W.; Lee, C. H. // International Journal of Modern Physics B: Condensed Matter Phys;3/20/2002, Vol. 16 Issue 6/7, p958 

    The adhesion, of a coating to the underlying substrate, in terms of critical load (using scratch test) is complex and is a function of many parameters such as coating thickness, interfacial stress, coefficient of friction, intermixing, hardness, structural parameters, etc. The present study...

  • Heteroepitaxial Growth and Annealing of γ-Al[sub 2]O[sub 3] Thin Films on Silicon. Tan, Liwen; Wang, Jun; Wang, Qiyuan; Yu, Yuanhuan; Lin, Lanying // International Journal of Modern Physics B: Condensed Matter Phys;11/20/2002, Vol. 16 Issue 28/29, p4302 

    The γ-Al[sub 2]O[sub 3] films were grown on Si (100) substrates using the sources of TMA (Al (CH[sub 3])[sub 3]) and O[sub 2] by very low-pressure chemical vapor deposition (VLP-CVD). It has been found that the γAl[sub 2]O[sub 3] film has a mirror-like surface and the RMS was about 2.5nm....


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics