Nondestructive technique for the detection of dislocations and stacking faults on silicon wafers

Witowski, Bob; Smith, W. Lee; Willenborg, David L.
February 1988
Applied Physics Letters;2/22/1988, Vol. 52 Issue 8, p640
Academic Journal
We demonstrate the imaging of dislocations and stacking faults in silicon wafers in a noncontact, nondestructive fashion using laser based modulated optical reflectance. By comparison with conventional wet decoration etching, we show that the sensitivity of the modulated optical reflectance method can resolve the difference between two types of dislocations.


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