Y-Ba-Cu-O superconducting thin films by simultaneous or sequential evaporation

Mogro-Campero, A.; Hunt, B. D.; Turner, L. G.; Burrell, M. C.; Balz, W. E.
February 1988
Applied Physics Letters;2/15/1988, Vol. 52 Issue 7, p584
Academic Journal
Superconducting thin films of Y-Ba-Cu-O near the 1:2:3 stoichiometry were produced by simultaneous (coevaporation) and sequential (multilayer) evaporation in the same evaporator. The best film obtained on yttria-stabilized zirconia (YSZ) had a superconducting onset temperature of 104 K, a midpoint Tc of 92 K, and zero resistance at T≤74 K. Stoichiometry was deduced by inductively coupled plasma emission spectroscopy, and elemental depth profiles were obtained by x-ray photoelectron spectroscopy. Film stoichiometry changes only near the film/substrate boundary for films on YSZ. Films on Si/SiO2 were not superconducting; depth profiling shows severe changes of film composition with depth. A major theme of this work is process reproducibility, which was found to be poor for coevaporation but improved considerably for sequential evaporation.


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