TITLE

Diffusion of reactive ion beam etched polymers

AUTHOR(S)
Tead, Stanley F.; Vanderlinde, William E.; Ruoff, Arthur L.; Kramer, Edward J.
PUB. DATE
January 1988
SOURCE
Applied Physics Letters;1/11/1988, Vol. 52 Issue 2, p101
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The diffusion of deuterated polystyrene (d-PS) in a polystyrene matrix was used to probe the damage to the polymer surface caused by reactive ion beam etching (RIBE). Diffusion was seen to be hindered in a d-PS film treated by RIBE, an immobilization apparently due to crosslinking of the surface monolayer of the polymer sample.
ACCESSION #
9825573

 

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