TITLE

Laser writing of copper lines from metalorganic films

AUTHOR(S)
Gupta, A.; Jagannathan, R.
PUB. DATE
December 1987
SOURCE
Applied Physics Letters;12/28/1987, Vol. 51 Issue 26, p2254
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Direct writing of high-purity copper lines has been achieved by photothermal decomposition of copper formate films under ambient conditions using a focused argon ion laser (514 nm) beam on a scanning quartz or silicon substrate. The fast decomposition kinetics of the precursor allows use of writing speeds as high as 1 cm/s for deposition of micron-thick copper films. There is negligible oxidation of the copper after decomposition in the presence of air due to the rapid heating and cooling of the deposit during laser writing.
ACCESSION #
9825428

 

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