Aerosol jet etching of fine patterns

Chen, Y. L.; Brock, J. R.; Trachtenberg, I.
December 1987
Applied Physics Letters;12/28/1987, Vol. 51 Issue 26, p2203
Academic Journal
Successful demonstration of a new etching technique, aerosol jet etching (AJE), is reported. AJE has been used to pattern fine lines with good anisotropy in silicon dioxide surfaces on silicon substrates using a hydrofluoric acid ultrafine aerosol jet.


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