TITLE

Collection mode near-field scanning optical microscopy

AUTHOR(S)
Betzig, E.; Isaacson, M.; Lewis, A.
PUB. DATE
December 1987
SOURCE
Applied Physics Letters;12/21/1987, Vol. 51 Issue 25, p2088
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Super-resolution imaging at optical wavelengths has been achieved with collection mode near-field scanning optical microscopy. Reproducible images of 0.25-μm aluminum lines separated by 0.25 μm have been generated with a peak edge sharpness of 0.07 μm. Images taken with differing probe sizes and at various heights demonstrate that the smallest resolvable features are roughly determined by the greater of the aperture size and the aperture to sample separation.
ACCESSION #
9825393

 

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