Ultraviolet-light-induced deposition of gold films

Ye, Yutang; Hunsperger, Robert G.
December 1987
Applied Physics Letters;12/21/1987, Vol. 51 Issue 25, p2136
Academic Journal
Gold film has been deposited by ultaviolet-light-induced photolysis of ammonium tetrachloroaurate/nitrocellulose film. The minimum feature size achieve is about 1 μm, and the film exhibits good adhesion. The effect of temperature on the photolyzing rate has been examined.


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