Sputter deposition of YBa2Cu3O7-y thin films

Silver, R. M.; Talvacchio, J.; de Lozanne, A. L.
December 1987
Applied Physics Letters;12/21/1987, Vol. 51 Issue 25, p2149
Academic Journal
Thin films of YBa2Cu3O7-y were prepared by magnetron sputtering. The films were characterized by x-ray diffraction, in situ x-ray photoelectron spectroscopy to determine the as-deposited oxygen content for various substrate temperatures, and scanning electron microscopy to analyze the microstructure. The orthorhombic phase was observed after an ex situ 700 °C anneal. We have obtained films which were completely superconducting at 82 K with 6 K transition widths.


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