TITLE

Superconducting and structural properties of sputtered thin films of YBa2Cu3O7-x

AUTHOR(S)
Makous, J. L.; Maritato, L.; Falco, Charles M.; Cronin, J. P.; Rajendran, G. P.; Uhlmann, E. V.; Uhlmann, D. R.
PUB. DATE
December 1987
SOURCE
Applied Physics Letters;12/21/1987, Vol. 51 Issue 25, p2164
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have fabricated thin films of YBa2Cu3Ox by dc triode sputtering from two metallic targets. Post-annealing in pure O2 after sputtering resulted in superconducting films with a Tc onset as high as 89 K and a midpoint Tc of 75 K. We report preliminary results of films deposited on sapphire, MgO and sol-gel coatings of ZrO2 on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x-ray diffraction techniques and Rutherford backscattering spectroscopy.
ACCESSION #
9825338

 

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