High current Cu3P liquid metal ion source using a novel extractor configuration

Higuchi-Rusli, R. H.; Corelli, J. C.
December 1987
Applied Physics Letters;12/21/1987, Vol. 51 Issue 25, p2170
Academic Journal
It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS’s). In standard previously used LMIS’s the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems.


Related Articles

  • Experimental validation of a mass- efficiency model for an indium liquid-metal ion source. Tajmar, M.; Genovese, A. // Applied Physics A: Materials Science & Processing;2003, Vol. 76 Issue 6, p1003 

    A model is derived linking microdroplet emission of a liquid-metal ion source (LMIS) to the actual current-voltage characteristic and operating temperature. All parameters were experimentally investigated using an indium LMIS, confirming the relationships found. The model allows for the first...

  • Comparison of bismuth emitting liquid metal ion sources. Bischoff, L.; Pilz, W.; Mazarov, P.; Wieck, A. D. // Applied Physics A: Materials Science & Processing;Apr2010, Vol. 99 Issue 1, p145 

    Four different liquid metal ion sources (LMIS), working with pure Bi as well as with Bi containing alloys (Au13Bi87, Ga38Bi62, Ga35Bi60Li5) were investigated with respect to the emission behavior as a function of current and temperature, the mass spectra and the energy distribution of the...

  • Liquid metal alloy ion source based metal ion injection into a room-temperature electron beam ion source. Thorn, A.; Ritter, E.; Ullmann, F.; Pilz, W.; Bischoff, L.; Zschornack, G. // Review of Scientific Instruments;Feb2012, Vol. 83 Issue 2, p02A511 

    We have carried out a series of measurements demonstrating the feasibility of using the Dresden electron beam ion source (EBIS)-A, a table-top sized, permanent magnet technology based electron beam ion source, as a charge breeder. Low charged gold ions from an AuGe liquid metal alloy ion source...

  • Liquid metal alloy ion sources--An alternative for focussed ion beam technology. Bischoff, Lothar; Mazarov, Paul; Bruchhaus, Lars; Gierak, Jacques // Applied Physics Reviews;2016, Vol. 3 Issue 2, p021101-1 

    Today, Focused Ion Beam (FIB) processing is nearly exclusively based on gallium Liquid Metal Ion Sources (LMIS). But, many applications in the μm- or nm range could benefit from ion species other than gallium: local ion implantation, ion beam mixing, ion beam synthesis, or Focused Ion Beam...

  • Emission properties of a dual ion/electron point emitter based on In–Bi alloy. Wen-Pin Hsieh, A.; Sheu, B.L.; Wang, Y.L. // Applied Physics Letters;9/15/2003, Vol. 83 Issue 11, p2277 

    A stable dual ion/electron point emitter based on In–Bi alloy has been fabricated. Its performance as a liquid metal ion source (LMIS) at 70–100 °C, which is much lower than the operating temperature of the Au–In emitter reported previously, is comparable to a typical...

  • Temperature Dependence On The Emission Characteristics Of A AuGe Liquid Metal Alloy Ion Source. Ganetsos, Theodore; Bischoff, Lothar; Pilz, Wolfgang; Akhmadaliev, Chavkat; Laskaris, Nikos; Kotsos, Bill // AIP Conference Proceedings;2007, Vol. 899 Issue 1, p423 

    Focused ion beam systems employing liquid metal ion sources have become of increasing importance in the microelectronics industry. Maskless ion implantation as a modern patterning technique is one of the most attractive application of Focused Ion Beams. In spite of the fact that a great deal of...

  • Electrohydrodynamically driven large-area liquid-metal ion sources. Pregenzer, Arian L. // Journal of Applied Physics;12/15/1985, Vol. 58 Issue 12, p4509 

    Investigates the possibility of forming large-area liquid-metal ion sources by examining the behavior of a planar liquid-conducting surface in the presence of a high electric field. Application of electrohydrodynamic instability theory to a planar liquid-lithium surface; Equations of motion and...

  • Magnetic flowmeters with controlled boundary conditions. I. Vel’t; Yu. Mikhailova // Measurement Techniques;May2007, Vol. 50 Issue 5, p560 

    Abstract  Magnetic flowmeters for liquid metal with improved properties are considered for which distribution of the electric potential at a channel surface is controlled by means of an extraneous current fed to the measurement electrodes.

  • Start-Up Devises Liquid Metal Batteries for the Grid. Murray, Chuck // Design News;Apr2013, Vol. 68 Issue 4, p28 

    The article reports that giant cells that are composed of liquid electrodes and an electrolyte capable of storing large amounts of solar and wind power at a low cost are being developed by Ambri, a startup company that was formed out of Massachusetts Institute of Technology (MIT).


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics