TITLE

High current Cu3P liquid metal ion source using a novel extractor configuration

AUTHOR(S)
Higuchi-Rusli, R. H.; Corelli, J. C.
PUB. DATE
December 1987
SOURCE
Applied Physics Letters;12/21/1987, Vol. 51 Issue 25, p2170
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS’s). In standard previously used LMIS’s the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems.
ACCESSION #
9825310

 

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