TITLE

Comment on ‘‘Exact analytical solution to diffusion equation for ion-implanted dopant profile evolution during annealing’’ [Appl. Phys. Lett. 50, 155 (1987)]

AUTHOR(S)
King, J. R.
PUB. DATE
November 1987
SOURCE
Applied Physics Letters;11/16/1987, Vol. 51 Issue 20, p1646
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Comments on Moroi and Hemenger's article, titled `Exact analytical solution to diffusion equation for ion-implanted dopant profile evolution during annealing'. Transformation which reduces a nonlinear diffusion equation; Error in Moroi and Hemenger's article.
ACCESSION #
9824899

 

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