Comment on ‘‘Exact analytical solution to diffusion equation for ion-implanted dopant profile evolution during annealing’’ [Appl. Phys. Lett. 50, 155 (1987)]

King, J. R.
November 1987
Applied Physics Letters;11/16/1987, Vol. 51 Issue 20, p1646
Academic Journal
Comments on Moroi and Hemenger's article, titled `Exact analytical solution to diffusion equation for ion-implanted dopant profile evolution during annealing'. Transformation which reduces a nonlinear diffusion equation; Error in Moroi and Hemenger's article.


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