Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7-x

Char, K.; Kent, A. D.; Kapitulnik, A.; Beasley, M. R.; Geballe, T. H.
October 1987
Applied Physics Letters;10/26/1987, Vol. 51 Issue 17, p1370
Academic Journal
Superconducting thin films of YBa2Cu3O7-x have been successfully made by co-sputtering from the three targets in an Ar and O2 mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×105 A/cm2 at 78 K and 2×106 A/cm2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.


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