TITLE

Enhanced Cu-Teflon adhesion by presputtering treatment: Effect of surface morphology changes

AUTHOR(S)
Chang, Chin-An
PUB. DATE
October 1987
SOURCE
Applied Physics Letters;10/19/1987, Vol. 51 Issue 16, p1236
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The recently observed enhancement in adhesion between Cu and Teflon due to a presputtering treatment of Teflon prior to the Cu deposition is analyzed. The sputtering treatment resulted in a morphology change of the Teflon, with the deposited Cu showing similar textures, and changes in chemical bondings between the two. A simple geometric model is used to analyze the contribution from the morphology changes to the observed peel strength. It is shown that, for a finite chemical bonding, an appreciable contribution to the peel strength is possible from the morphology changes observed.
ACCESSION #
9824601

 

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