Enhanced Cu-Teflon adhesion by presputtering treatment: Effect of surface morphology changes

Chang, Chin-An
October 1987
Applied Physics Letters;10/19/1987, Vol. 51 Issue 16, p1236
Academic Journal
The recently observed enhancement in adhesion between Cu and Teflon due to a presputtering treatment of Teflon prior to the Cu deposition is analyzed. The sputtering treatment resulted in a morphology change of the Teflon, with the deposited Cu showing similar textures, and changes in chemical bondings between the two. A simple geometric model is used to analyze the contribution from the morphology changes to the observed peel strength. It is shown that, for a finite chemical bonding, an appreciable contribution to the peel strength is possible from the morphology changes observed.


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