Effect of Ne and Ar on the performance of a high-pressure ArF* laser pumped by a small coaxial electron beam

Peters, P. J. M.; Fierkens, I. H. T.; Witteman, W. J.
September 1987
Applied Physics Letters;9/21/1987, Vol. 51 Issue 12, p883
Academic Journal
Optimizations of the F2/Ar/Ne gas composition and the optical cavity configuration were performed for an ArF* laser in the pressure range from 1 to 14 bar. The excitation source was a coaxial electron beam with a pulse length of 40 ns. From an active volume of 16 cm3 a maximum output energy of 130 mJ at a total gas pressure of 14 bar was obtained when Ne was used as the buffer gas.


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