TITLE

Control of hydrogen content of boron thin films produced in a dc toroidal discharge

AUTHOR(S)
Toyoda, H.; Sugai, H.; Isozumi, T.; Okuda, T.
PUB. DATE
September 1987
SOURCE
Applied Physics Letters;9/14/1987, Vol. 51 Issue 11, p798
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Hydrogenated amorphous boron films have been produced by a toroidal glow discharge of B2H6/He mixtures at low pressures (10-2 Torr). Chemically stable pure films with a low hydrogen content can be formed at a moderate substrate temperature (∼200 °C) when the diborane flow rate is raised above 10 sccm with the discharge power lowered below 100 W. The controllability of H content is potentially interesting for applications in the coating of nuclear fusion devices, as well as for use in electronic devices.
ACCESSION #
9824202

 

Related Articles

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics