TITLE

Synthesis of diamond films in a rf induction thermal plasma

AUTHOR(S)
Matsumoto, Seiichiro; Hino, Mototsugu; Kobayashi, Toyohiko
PUB. DATE
September 1987
SOURCE
Applied Physics Letters;9/7/1987, Vol. 51 Issue 10, p737
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Microcrystals and microcrystalline films of diamond were prepared on molybdenum substrates in a thermal plasma which was produced by rf inductive heating in an argon-hydrogen-methane mixture gas under 1 atm pressure. The deposition rate amounted to 1 μm/min.
ACCESSION #
9824119

 

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