Synthesis of diamond films in a rf induction thermal plasma

Matsumoto, Seiichiro; Hino, Mototsugu; Kobayashi, Toyohiko
September 1987
Applied Physics Letters;9/7/1987, Vol. 51 Issue 10, p737
Academic Journal
Microcrystals and microcrystalline films of diamond were prepared on molybdenum substrates in a thermal plasma which was produced by rf inductive heating in an argon-hydrogen-methane mixture gas under 1 atm pressure. The deposition rate amounted to 1 μm/min.


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