Thermionic emission model for the initial regime of silicon oxidation

Irene, E. A.; Lewis, E. A.
September 1987
Applied Physics Letters;9/7/1987, Vol. 51 Issue 10, p767
Academic Journal
The very early stage of the thermal oxidation of single-crystal Si has been the subject of continual study for the last two decades. In the light of very recent experimental oxidation data on the initial regime, we report that a simple thermionic electron flux from Si into SiO2 closely agrees with the SiO2 film growth rate. The importance of electrons for the oxidation kinetics has also been attested to in several recent experimental studies. Thus a consistent model is presented for the initial oxidation regime based on the electron flux as the rate limiting step.


Related Articles

  • Note: Discharging fused silica test masses with ionized nitrogen. Ugolini, D.; Funk, Q.; Amen, T. // Review of Scientific Instruments;Apr2011, Vol. 82 Issue 4, p046108 

    We have developed a technique for discharging fused silica test masses in a gravitational-wave interferometer with nitrogen ionized by an electron beam. The electrons are produced from a heated filament by thermionic emission in a low-pressure region to avoid contamination and burnout. Some...

  • Company spotlight: Thermo Electron. Brill, Jack A.; Brill, Hall // In Business;Mar/Apr96, Vol. 18 Issue 2, p37 

    Profiles the company Thermo Electron, founded by George Hatsopoulos, Ph.D., who pioneered in thermionics, the conversion of heat to electricity. Incorporation of the technology in other production processes; Company earnings per share and revenues from 1993 to 1996; Spin-off companies.

  • The inflow moments method for the description of electron transport at material interfaces. Schroeder, Dietmar // Journal of Applied Physics;8/1/1992, Vol. 72 Issue 3, p964 

    Presents a study that introduced the inflow moments method as a general procedure for the derivation of interface or boundary conditions for advanced models of carrier transport in semiconductor devices. Background on the electron transport in semiconductor devices; Information on hot-electron...

  • Thermionic electron emission of small tungsten cluster anions on the milliseconds time scale. Weidele, H.; Kreisle, D.; Recknagel, E.; Becker, St.; Kluge, H.-J.; Lindinger, M.; Schweikhard, L.; Walther, C.; Ziegler, J. // Journal of Chemical Physics;5/1/1999, Vol. 110 Issue 17, p8754 

    Discusses the thermionic electron emission of small tungsten cluster anions on the milliseconds time scale. Storage of the anions in a Penning trap; Electronic excitation of the cluster ions by photoabsorption; Observation of delayed electron emission on the milliseconds time scale by variation...

  • High-current-density gun with a LaB[sub 6] cathode. Ebihara, K.; Hiramatsu, S. // Review of Scientific Instruments;Aug1996, Vol. 67 Issue 8, p2765 

    Discusses a gun assembly heated to high temperature and a cathode heating system using electron bombardment and radiation from a heater. Results of the high-voltage operation of the gun; Examination of a prototype of a Pierce-type electron gun using planar 12-millimeter-diam lanthanum...

  • Time-dependent delayed electron spectra: a direct measurement of total decay rate as a function of internal energy. L├ępine, F.; Climen, B.; Lebeault, M. A.; Bordas, C. // European Physical Journal D -- Atoms, Molecules, Clusters & Opti;Dec2009, Vol. 55 Issue 3, p627 

    We present a general method to measure internal energy dependant decay rate in the case of systems emitting thermal electrons. Our approach is based on the measurement of the time-dependent kinetic energy spectra of delayed electrons using time-resolved velocity map imaging spectrometry. We...

  • On Oscillations of Thermionic Current in Composite Systems. Starostin, A. N.; Chesnokov, M. A. // Journal of Experimental & Theoretical Physics;Dec2003, Vol. 97 Issue 6, p1219 

    Thermionic current emitted into vacuum by a composite system consisting of a metal layer of finite thickness L and a metal half-space is investigated. An explicit expression for thermionic current is obtained that takes into account the quantum phenomena of above-barrier reflection and the...

  • Progress Toward a Gigawatt-Class Annular Beam Klystron with a Thermionic Electron Gun. Fazio, M.; Carlsten, B.; Farnham, J.; Habiger, K.; Haynes, W.; Myers, J.; Nelson, E.; Smith, J.; Arfin, B.; Haase, A.; Scheitrum, G. // AIP Conference Proceedings;2002, Vol. 625 Issue 1, p159 

    In an effort to reach the gigawatt power level in the microsecond pulse length regime Los Alamos, in collaboration with SLAC, is developing an annular beam klystron (ABK) with a thermionic electron gun. We hope to address the causes of pulse shortening in very high peak power tubes by building a...

  • The role of hole leakage in 1300-nm InGaAsN quantum-well lasers. Tansu, Nelson; Mawst, Luke J. // Applied Physics Letters;3/10/2003, Vol. 82 Issue 10, p1500 

    We calculate the thermionic escape times of electrons and holes in InGaAsN and InGaAs quantum wells using the most recent input data. The short thermionic escape time of holes from the InGaAsN quantum well indicates that hole leakage may be a significant factor in the poorer temperature...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics