TITLE

In situ observation on electron beam induced chemical vapor deposition by Auger electron spectroscopy

AUTHOR(S)
Matsui, Shinji; Mori, Katsumi
PUB. DATE
August 1987
SOURCE
Applied Physics Letters;8/31/1987, Vol. 51 Issue 9, p646
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
W deposition, using WF6 gas source by electron beam induced surface reaction, has been studied by Auger electron spectroscopy. W Auger electron signals have been observed for WF6 adlayer by Auger electron spectroscopy. Moreover, initial growth for W deposition has been observed in situ by Auger electron spectroscopy. As a result, it became clear that a growth rate for W deposition is proportional to WF6 gas pressure and can be ∼1 Å/min at 2×10-7 Torr.
ACCESSION #
9824066

 

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