Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high Tc bulk material

Dijkkamp, D.; Venkatesan, T.; Wu, X. D.; Shaheen, S. A.; Jisrawi, N.; Min-Lee, Y. H.; McLean, W. L.; Croft, M.
August 1987
Applied Physics Letters;8/24/1987, Vol. 51 Issue 8, p619
Academic Journal
We report the first successful preparation of thin films of Y-Ba-Cu-O superconductors using pulsed excimer laser evaporation of a single bulk material target in vacuum. Rutherford backscattering spectrometry showed the composition of these films to be close to that of the bulk material. Growth rates were typically 0.1 nm per laser shot. After an annealing treatment in oxygen the films exhibited superconductivity with an onset at 95 K and zero resistance at 85 and 75 K on SrTiO3 and Al2O3 substrates, respectively. This new deposition method is relatively simple, very versatile, and does not require the use of ultrahigh vacuum techniques.


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