New type cryogenic thermometer using sputtered Zr-N films

Yotsuya, Tsutom; Yoshitake, Masaaki; Yamamoto, Junya
July 1987
Applied Physics Letters;7/27/1987, Vol. 51 Issue 4, p235
Academic Journal
A new type thin-film thermometer using sputtered Zr-N films especially for cryogenic temperature range has been developed. Zr-N thermometers have high sensitivity in a wide temperature region from 300 to 2 K or even lower, and have a response quick enough to detect the second sound in superfluid helium. It is found that the developed thermometers are insensitive to magnetic field. Temperature error induced by application of magnetic field up to 6 T is only less than 4.5 mK at 4.2 K.


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