Direct writing of submicron metallic features with a scanning tunneling microscope

Silver, R. M.; Ehrichs, E. E.; de Lozanne, A. L.
July 1987
Applied Physics Letters;7/27/1987, Vol. 51 Issue 4, p247
Academic Journal
We demonstrate for the first time that the scanning tunneling microscope can be used to write metallic features on a surface without further process steps. Using organometallic gases we have obtained features down to 20 nm in size.


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