TITLE

Electrostatic collection of debris resulting from 193 nm laser etching of polyimide

AUTHOR(S)
von Gutfeld, R. J.; Srinivasan, R.
PUB. DATE
July 1987
SOURCE
Applied Physics Letters;7/6/1987, Vol. 51 Issue 1, p15
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Ablated debris produced by 193 nm laser irradiation of polyimide can be preferentially collected on charged wire or plate electrodes placed on the polymer surface. Scanning micrographs indicate several types of debris structure depending on laser fluence and applied potential. The fragment morphology and possible charging mechanisms are discussed. The collected debris is believed to consist of pure carbon.
ACCESSION #
9823480

 

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