TITLE

Intermixing of AlxGa1-xAs/GaAs superlattices by pulsed laser irradiation

AUTHOR(S)
Ralston, J.; Moretti, A. L.; Jain, R. K.; Chambers, F. A.
PUB. DATE
June 1987
SOURCE
Applied Physics Letters;6/22/1987, Vol. 50 Issue 25, p1817
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Intermixing of AlxGa1-xAs/GaAs superlattices is demonstrated utilizing laser pulses of a few nanosecond duration. Raman spectroscopy and sputter Auger profiling have been used to assess the degree of intermixing and residual damage in the laser irradiated samples. The results indicate that irradiating with the spatially uniform beam of the excimer laser generates a completely intermixed alloy with no detected residual damage. A thermal melting model is used to qualitatively describe the results.
ACCESSION #
9823301

 

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