TITLE

Electron spin resonance observation of defects in device oxides damaged by soft x rays

AUTHOR(S)
Triplett, B. B.; Takahashi, T.; Sugano, T.
PUB. DATE
June 1987
SOURCE
Applied Physics Letters;6/8/1987, Vol. 50 Issue 23, p1663
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report the use of vacuum soft x-ray (VXR) exposure to efficiently generate paramagnetic defects in thin oxide layers. The VXR technique allows the observation of an E’ related defect called the 74-G doublet in quantities as large as the E’. This defect is the first paramagnetic defect observed in thin oxides at room temperature to involve hydrogen.
ACCESSION #
9823212

 

Related Articles

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics