TITLE

Influence of conductor linewidth on short-circuit failure

AUTHOR(S)
Towner, Janet M.
PUB. DATE
June 1987
SOURCE
Applied Physics Letters;6/1/1987, Vol. 50 Issue 22, p1581
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A study was made on the influence of conductor linewidth on electromigration-induced short-circuit failure in layered TiW/Al-1% Cu conductors. Experimental results suggest that the median time to failure is constant for conductors wider than a critical dimension.
ACCESSION #
9823104

 

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