TITLE

Study of the moving species in ion-induced reactions

AUTHOR(S)
Tao, K.; Hewett, C. A.; Lau, S. S.; Buchal, Ch.; Poker, D. B.
PUB. DATE
May 1987
SOURCE
Applied Physics Letters;5/11/1987, Vol. 50 Issue 19, p1343
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We present evidence in this study that the moving species under ion mixing conditions are affected by the implantation damage distribution in the sample. This observation holds for metal-semiconductor, metal-metal, and semiconductor-semiconductor systems. The direction of thermal annealing atomic transport appears to play a role in ion mixing as well. When these two factors are in the same direction, only one dominant moving species is observed. When these two factors are in opposite directions, both constituents can contribute to the atomic transport in ion mixing.
ACCESSION #
9822945

 

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