Wavelength control of iron/nickel composition in laser induced chemical vapor deposited films

Armstrong, J. V.; Burk, A. A.; Coey, J. M. D.; Moorjani, K.
May 1987
Applied Physics Letters;5/4/1987, Vol. 50 Issue 18, p1231
Academic Journal
It is shown that the composition of metallic deposits obtained by photodecomposition of a mixture of ferrocene and nickelocene vapor can be varied by selecting the laser wavelength to match features in the absorption spectra. Iron/nickel ratios of 92:8 and 65:35 are obtained by using 193 nm and 337 nm laser lines, respectively.


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