TITLE

Large volume, high density rf inductively coupled plasma

AUTHOR(S)
Boswell, R. W.; Porteous, R. K.
PUB. DATE
April 1987
SOURCE
Applied Physics Letters;4/27/1987, Vol. 50 Issue 17, p1130
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Magnetized argon plasma columns with peak densities of greater than 1018 m-3, lengths of 2 m, and full width half-maximum diameters of 0.3 m have been created at pressures of 40 mPa (3×10-4 Torr) with input powers of 1.5 kW of 7 MHz rf.
ACCESSION #
9822815

 

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