TITLE

Model of rf discharges at frequencies greater than the ionic plasma frequency

AUTHOR(S)
Pointu, A. M.
PUB. DATE
April 1987
SOURCE
Applied Physics Letters;4/20/1987, Vol. 50 Issue 16, p1047
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The extension of a previous model using an asymmetrical double-probe theory is set out to describe rf discharges in the opposite limit of mainly capacitive electrode sheaths. It reasonably agrees with available experimental results for an excitation frequency equal to or greater than 13.56 MHz.
ACCESSION #
9822727

 

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