Longitudinal discharge XeCl excimer laser with automatic UV preionization

Furuhashi, Hideo; Hiramatsu, Mineo; Goto, Toshio
April 1987
Applied Physics Letters;4/6/1987, Vol. 50 Issue 14, p883
Academic Journal
A longitudinal discharge XeCl 308-nm excimer laser operated with automatic spark UV preionization is reported. Laser oscillation has been obtained using a four-segmented longitudinal discharge tube of 260 mm length and 4 mm inner diameter and employing a capacitor transfer circuit with commercially available doorknob ceramic capacitors. Spark UV preionization has been found to increase the laser output energy.


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