TITLE

Microfabrication of molecular scale microstructures

AUTHOR(S)
Deckman, H. W.; Abeles, B.; Dunsmuir, J. H.; Roxlo, C. B.
PUB. DATE
March 1987
SOURCE
Applied Physics Letters;3/2/1987, Vol. 50 Issue 9, p504
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Microfabrication techniques have been used to prepare a new class of molecular scale microporous materials. These materials are formed by chemically etching slots into alternate layers of a lithographically exposed amorphous superlattice cross section. The slot width is accurately controllable from 10 Ã… to more than 500 Ã….
ACCESSION #
9822248

 

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