Continuum modeling of argon radio frequency glow discharges

Richards, Albert D.; Thompson, Brian E.; Sawin, Herbert H.
March 1987
Applied Physics Letters;3/2/1987, Vol. 50 Issue 9, p492
Academic Journal
A continuum model has been developed which successfully describes the concentration, movement, and energetics of charged particles within a rf discharge. This model includes continuity equations for all charged particles, Poisson’s equation to determine the local electric fields, and an electron energy balance to determine the ionization and energy-loss rates. All input parameters (diffusivity, mobility, ionization, and energy-loss rate) were defined using reported values determined in dc field experiments.


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