TITLE

Acoustic-jet plating of gold and copper at 7.5 MHz

AUTHOR(S)
von Gutfeld, R. J.; Vigliotti, D. R.; Wickramasinghe, H. K.
PUB. DATE
February 1987
SOURCE
Applied Physics Letters;2/16/1987, Vol. 50 Issue 7, p383
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We describe a new type of jet plating that uses a focused high-frequency sound field directed through the center of the jet. The acoustic jet results in an improved morphology for gold and copper depositions although plating rates are not enhanced. Four-point probe measurements of acoustic-jet plated copper lines show up to a 50% decrease in electrical resistivity compared to jet plated deposits.
ACCESSION #
9822143

 

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