TITLE

X-ray topography of growth striations in Czochralski-grown Si wafers

AUTHOR(S)
Imai, Masato; Noda, Hiroyuki; Shibata, Masahiro; Yatsurugi, Yoshifumi
PUB. DATE
February 1987
SOURCE
Applied Physics Letters;2/16/1987, Vol. 50 Issue 7, p395
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Growth striations in Czochralski-grown Si wafers have been observed by a scanning x-ray double-crystal method. We confirmed that the striations on the topographs relate to the variation of oxygen concentration.
ACCESSION #
9822137

 

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