TITLE

Laser induced fluorescence detection of CF and CF2 radicals in a CF4/O2 plasma

AUTHOR(S)
Booth, J. P.; Hancock, G.; Perry, N. D.
PUB. DATE
February 1987
SOURCE
Applied Physics Letters;2/9/1987, Vol. 50 Issue 6, p318
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Laser induced fluorescence has been used to detect ground-state CF and CF2 radicals in a CF4/O2 plasma etching reactor. Measurements are reported of the spatial variation of CF2 concentrations, of the CF radical rotational state distributions, and of the variation of both species with O2 content of the plasma.
ACCESSION #
9822087

 

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