Programmed magnetic field applied liquid encapsulated Czochralski crystal growth

Ozawa, Shoichi; Kimura, Tadashi; Kobayashi, Junji; Fukuda, Tsuguo
February 1987
Applied Physics Letters;2/9/1987, Vol. 50 Issue 6, p329
Academic Journal
We have developed a programmed magnetic field applied liquid encapsulated Czochralski crystal growth technique which produces a homogeneous impurity distribution along the growth axis of the crystal. In this technique the magnetic field strength is controlled in a programmed manner during growth. The results of growing iron-doped InP crystal with this technique are presented.


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