Statistical equilibrium in particle channeling

Davidson, B. A.; Feldman, L. C.; Bevk, J.; Mannaerts, J. P.
January 1987
Applied Physics Letters;1/19/1987, Vol. 50 Issue 3, p135
Academic Journal
We have used a unique sample configuration consisting of thin, epitaxial films of Ge sandwiched within a Si(100) lattice to explore the conditions for statistical equilibrium in particle channeling. Indications of nonequilibrium came about from a strong asymmetry in the off-normal angular scans. We find the depth necessary to achieve statistical equilibrium to be ∼2200 Å for 1.8 MeV He particle channeling along the Si<110> direction. This measurement provides a useful guide for the interpretation of channeling experiments in a variety of near-surface applications.


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