Effective elastic constants of thin-film tungsten-silicide from surface acoustic wave analysis

Crean, G. M.; Golanski, A.; Oberlin, J. C.
January 1987
Applied Physics Letters;1/12/1987, Vol. 50 Issue 2, p74
Academic Journal
The dispersion of surface acoustic waves propagating on single-crystal (100) silicon substrates covered by thin films of tungsten-silicide has been investigated using an acoustic material signature technique at a frequency of 339 MHz. The tungsten-silicide layers (500–2500 Å) were deposited using a co-sputtering technique, isochronally annealed at temperatures of 700 and 850 °C for 45 min in an argon atmosphere and examined using Rutherford backscattering spectrometry. Dispersion curves were calculated using a Tiersten model [J. Appl. Phys. 40, 2 (1969)] and fitted to the experimental dispersion data. The effective elastic constants for annealed and ‘‘as-deposited’’ layers were determined as best-fit parameters.


Related Articles

  • WO3-Pd Structure in SAW Sensor for Hydrogen Detection. Hejczyk, T.; Urbańczyk, M. // Acta Physica Polonica, A.;Oct2011, Vol. 120 Issue 4, p616 

    In the paper a new sensor structure for surface acoustic wave gas system is presented. A bilayer structure WO3-Pd thin films may be useful for hydrogen detection in low concentration in air. A bilayer sensor structure of tungsten oxide WO3 with a very thin catalytic film of palladium on the top...

  • SAW spectral characteristics of the YZ�LiNbO[sub 3]�thin-lead-film layered structure. Kulakova, L. A.; D�yakonov, K. V.; Yakhkind, �. Z. // Physics of the Solid State;Mar99, Vol. 41 Issue 3, p489 

    An acousto-optical study of the effect of a lead film on propagation of high-power surface acoustic waves (SAW) along the Z direction on the Y cut of LiNbO[sub 3] is reported. The presence of the metal film has been found to stimulate spatial oscillations of SAW components and suppress the onset...

  • Real-time imaging of surface acoustic waves in thin films and microstructures on opaque substrates (invited). Sugawara, Y.; Wright, O. B.; Matsuda, O. // Review of Scientific Instruments;Jan2003, Vol. 74 Issue 1, p519 

    We present a real-time imaging technique for surface acoustic waves on samples with opaque substrates. We image the surface acoustic wave propagation on a silicon substrate coated with a gold film, and derive the dispersion relation for propagation in symmetry directions. In addition, we image...

  • Epitaxial growth of LiNbO[sub 3] thin films by excimer laser ablation method and their surface.... Shibata, Yoshihiko; Kaya, Kiyoshi // Applied Physics Letters;8/24/1992, Vol. 61 Issue 8, p1000 

    Investigates the epitaxial growth of LiNbO[sub 3] thin films by excimer laser ablation method. Evaluation of the surface acoustic wave (SAW) properties of the films; Determination of the temperature coefficients; Suitability of the films for the fabrication of a high frequency SAW device.

  • Surface acoustic wave propagation on lead zirconate titanate thin films. Sreenivas, K.; Sayer, M.; Baar, D. J.; Nishioka, M. // Applied Physics Letters;2/29/1988, Vol. 52 Issue 9, p709 

    Piezoelectric activity in reactively sputtered lead zirconate titanate [Pb(Zr,Ti)O3 or PZT] thin films has been confirmed through the fabrication of surface acoustic wave delay lines on poled polycrystalline films of PZT deposited on glass substrates. Films of varying thickness ranging from 3.4...

  • Experimental and theoretical surface acoustic wave analysis of thin-film lipid multilayers. Bianco, Bruno; Cambiaso, Andrea // Applied Physics Letters;7/27/1992, Vol. 61 Issue 4, p402 

    Investigates the leaky surface acoustic wave velocity of thin films of lipids on glass substrate. Use of reflection acoustic microscope; Deposition of w-tricosenoic acid on the silanized glass; Correlation of velocity with lipid-layer thickness.

  • Anomalous Acoustoelectric Effect and the Transport Properties of Thin La[sub 0.67]Ca[sub 0.33]MnO[sub 3] Films. Ilisavskii, Yu. V.; Goltsev, A. V.; Dyakonov, K. V.; Kartenko, N. F.; Popov, V. V.; Yakhkind, E. Z.; Dyakonov, V. P.; Klimov, A. V. // Journal of Experimental & Theoretical Physics;Jun2002, Vol. 94 Issue 6, p1179 

    A complex of studies of the physical properties of thin lanthanum manganite La[sub 0.67]Ca[sub 0.33]MnO[sub 3] films were performed for a monolithic layered structure consisting of a LiNbO[sub 3] substrate and a La[sub 0.67]Ca[sub 0.33]MnO[sub 3] thin epitaxial film. For the first time, not only...

  • Elastic constants of single-crystal transition-metal nitride films measured by line-focus acoustic microscopy. Kim, J. O.; Achenbach, J. D.; Mirkarimi, P. B.; Shinn, M.; Barnett, S. A. // Journal of Applied Physics;9/1/1992, Vol. 72 Issue 5, p1805 

    Presents a study which determined the elastic constants of single-crystal NbN, VN, and TiN films from surface acoustics wave dispersion curves. Way in which wave dispersion curves were obtained; Functions of the angle of propagation; Role of a modified simplex method.

  • Study of the structural features of skeletonized Langmuir—Blodgett films by means of volume-acoustic-wave and surface-acoustic-wave devices. Filippov, V. V.; Severin, F. M.; Zhavnerko, G. K. // Technical Physics;Feb97, Vol. 42 Issue 2, p186 

    Langmuir-Blodgett films made from 1.3-diketones of metals are studied by the microbalance and surface-acoustic-wave methods and by ellipsometry. It is shown that parallel studies of this kind, taken together with measurements of the surface density and resistivity of the films, permit an...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics