Interference peaks in double-crystal x-ray rocking curves of laser structures

Chu, X.; Tanner, B. K.
December 1986
Applied Physics Letters;12/29/1986, Vol. 49 Issue 26, p1773
Academic Journal
Interference peaks in double-crystal x-ray rocking curves have been observed in GaAlAs laser structures. The interference has been shown to arise from phase coherence of the x-ray waves across a thin heteroepitaxial layer sandwiched between two layers of equal composition. It is shown that the interference fringes can be used to measure active layer thicknesses to ±200 Å. This is despite the fact that the active layer peak cannot be resolved in the rocking curve.


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