TITLE

Crystal structure of sputter-synthesized CoNx thin films

AUTHOR(S)
Matsuoka, Morito; Ono, Ken’ichi
PUB. DATE
December 1986
SOURCE
Applied Physics Letters;12/15/1986, Vol. 49 Issue 24, p1644
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter discusses the synthesis of CoNx films using rf diode reactive sputtering. It describes the properties of crystal structures in CoNx thin films and in particular, the post-annealing effects on the crystal structures of CoNx. The CoNx films have the crystal structures of ε-Co(hcp), α-Co(fcc), α’-Co(fcc) as a superstructure of α-Co, γ-Co3N(hcp), and δ-Co2N(orthorhombic). The crystal structures have topotaxial relationships with each other, and exist in a wider composition range than in bulk.
ACCESSION #
9821677

 

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