Crystal structure of sputter-synthesized CoNx thin films

Matsuoka, Morito; Ono, Ken’ichi
December 1986
Applied Physics Letters;12/15/1986, Vol. 49 Issue 24, p1644
Academic Journal
This letter discusses the synthesis of CoNx films using rf diode reactive sputtering. It describes the properties of crystal structures in CoNx thin films and in particular, the post-annealing effects on the crystal structures of CoNx. The CoNx films have the crystal structures of ε-Co(hcp), α-Co(fcc), α’-Co(fcc) as a superstructure of α-Co, γ-Co3N(hcp), and δ-Co2N(orthorhombic). The crystal structures have topotaxial relationships with each other, and exist in a wider composition range than in bulk.


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