High-resolution photovoltaic position sensing with Ti/Si superlattices

Willens, R. H.; Levine, B. F.; Bethea, C. G.; Brasen, D.
December 1986
Applied Physics Letters;12/15/1986, Vol. 49 Issue 24, p1647
Academic Journal
A detector to sense the position of a beam of light with a resolution of less than 100 Å has been fabricated with a Ti/Si amorphous superlattice on p-type Si. There are two regions of photovoltaic sensitivity, a low sensitivity region having a response of 1.6 mV/mm and a high sensitivity region having 1.5 mV/μm. This novel detector can sense the light spot position over large lateral dimensions, while the high central sensitivity region would permit servo driving to a null position with a high degree of precision. These characteristics also suggest the use of this device in a variety of other photonic transducers.


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