Transmission electron microscope study of the initial stage of formation of Pd2Si and Pt2Si

Aboelfotoh, M. O.; Alessandrini, A.; d’Heurle, F. M.
November 1986
Applied Physics Letters;11/10/1986, Vol. 49 Issue 19, p1242
Academic Journal
Transmission electron microscopy of the compounds formed from the reaction between amorphous Si and thin (0.5–20 nm) layers of Pd and Pt reveals the early formation of crystalline silicides. The presence of phase in an amorphous state prior to crystallization is not observed. These results appear to be in agreement with earlier results of surface electron spectroscopy studies on these systems.


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