Microstructure of magnetron co-sputtered CoCr thin films

Hong, M.; Nakahara, S.; van Dover, R. B.; Boone, T.
November 1986
Applied Physics Letters;11/10/1986, Vol. 49 Issue 19, p1308
Academic Journal
Magnetic CoCr films deposited on fused quartz substrates were prepared by the dual-gun magnetron co-sputtering technique. The cross-section transmission electron microscopy studies showed the establishment of a textured columnar structure of the hcp CoCr films. Furthermore, the columnar grains were found to nucleate at the surface of the substrates and grow with the c axis parallel to the film-normal direction. No initial layer of randomly oriented small equiaxed grains was observed.


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