Ion beam induced conductivity and structural changes in diamondlike carbon coatings

Prawer, S.; Kalish, R.; Adel, M.; Richter, V.
November 1986
Applied Physics Letters;11/3/1986, Vol. 49 Issue 18, p1157
Academic Journal
Energetic ion beam irradiation of diamondlike carbon thin films induces a decrease of 4–5 orders of magnitude in the resistivity of the films from their as-grown value of 107 Ω cm. The initial decrease in resistivity with increasing ion dose is due to the loss of hydrogen from the films with a concomitant decrease in the optical band gap. Heating the films during the irradiation greatly accelerates the rate of hydrogen loss as a function of dose. Once the hydrogen removal is complete, further irradiation increases the film conductivity by inducing the growth of microcrystallites of graphite.


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